Integrated Nanodevice and Nanosystem Fabrication

“A timely book that showcases some of the most important advances in nanodevices and nanofabrication, written by world-renowned experts.”

~Prof. H.-S. Philip Wong, Stanford University, USA

“This seven-chapter book reviews important new trends in nanotechnology and nanodevices, ranging from single-ion implantation and two-dimensional materials, such as graphene, to nanofabrication with a scanning probe microscope. The second part of the book deals with unconventional approaches to scaling nanoscale CMOS devices and to reducing device variability. Taken together, the book provides a wealth of information for graduate students and nanotechnology researchers, as well as a good insight into the future developments for engineers involved with nanosystem design and fabrication.”

~Prof. George Celler, Rutgers University, USA

“In this book, the authors address various advanced nanofabrication techniques and device issues for nano-CMOS extension. The topics are timely and their description is well balanced between innovation and practicality, as the authors evaluate each technique on the basis of the current CMOS technology. I strongly recommend the book to graduate students, researchers, and engineers in the industry and academia.”

~Prof. Byung Gook Park, Seoul National University, South Korea