Capacitance spectroscopy refers to techniques for characterizing the electrical properties of semiconductor materials, junctions, and interfaces, all from the dependence of device capacitance on frequency, time, temperature, and electric potential. This book includes 15 chapters written by world-recognized, leading experts in the field, in academia, national institutions, and industry, subdivided into four sections: Physics, Instrumentation, Applications, and Emerging Techniques. In the Physics section, we establish the fundamental framework relating capacitance and its allied concepts of conductance, admittance, and impedance to the electrical and optical properties of semiconductors. In the Instrumentation section, we review the electronic principles of capacitance measurements used by commercial products, as well as custom apparatus. In the Applications section, we detail the implementation in various scientific fields and industries, such as photovoltaics and electronic and optoelectronic devices. In the Emerging Techniques section, we present the latest advances of capacitance-based electrical characterization aimed at reaching nanometer-scale resolution.
This book is the first dedicated treatment of the subject of capacitance spectroscopy of semiconductors. This book caters to an audience with a wide background in materials science, electrical engineering, chemistry, and physics in various career stages from advanced undergraduate- and graduate-level students to professional researchers.
- This book is the first dedicated treatment of the subject of capacitance spectroscopy of semiconductors. All earlier publications, being in the form of review articles and single book chapters, have been peripheral or secondary by nature. In particular, this book differentiates itself unambiguously from E. Barsoukov and J. R. Macdonald, Eds. Impedance Spectroscopy Theory, Experiment, and Applications, New York: Wiley Interscience, 2005, which concerns electrochemistry exclusively.
- This book is the most comprehensive review of capacitance spectroscopy of semiconductors. It not only covers the established macroscopic techniques such capacitance-voltage, admittance spectroscopy, and deep-level transient spectroscopy but also expands into microscopic techniques such as scanning capacitance microscopy and scanning deep-level transient spectroscopy.
- This book collects authoritative reviews from leading experts in academia, national institutions, and industry.
- This book caters to an audience with a wide background in materials science, electrical engineering, chemistry, and physics in various career stages from graduate students to professional researchers.
An Introduction to Capacitance Spectroscopy in Semiconductors
Jian V. Li and Jennifer T. Heath
Deep-Level Transient Spectroscopy
Johan Lauwaert and Samira Khelifi
Capacitance-Voltage and Drive-Level–Capacitance Profiling
Jennifer T. Heath
Basic Techniques for Capacitance and Impedance Measurements
Marco Carminati and Giorgio Ferrari
Advanced Instrumentation for High-Resolution Capacitance and Impedance Measurements
Giorgio Ferrari and Marco Carminati
Time Domain–Based Impedance Detection
Comparison of Capacitance Spectroscopy for PV Semiconductors
Capacitive Techniques for the Characterization of Organic Semiconductors
Dario Natali and Mario Caironi
Capacitance Spectroscopy for MOS Systems
Salvador Dueñas and Helena Castán
Capacitance Spectroscopy in Single-Charge Devices
Alessandro Crippa, Marco Lorenzo Valerio Tagliaferri, and Enrico Prati
Scanning Capacitance Microscopy
Jian V. Li and Chun-Sheng Jiang
Probing Dielectric Constant at the Nanoscale with Scanning Probe Microscopy
Laura Fumagalli and Gabriel Gomila
SPM-Based Capacitance Spectroscopy
Jian V. Li, Giorgio Ferrari, and Chun-Sheng Jiang
Microwave Impedance Microscopy
Yong-Tao Cui and Eric Yue Ma