Since it was proposed in 1995 by Prof. Chou, nanoimprinting has grown rapidly. Now machines, resins, and molds for nanoimprinting are commercially available worldwide. The application fields of nanoimprinting are expanding to not only electronics but also optics, biology, and energy because nanoimprinting is a simple and convenient method for nanofabrication, and some devices are now being mass-produced. In the near future, the application of nanoimprinting to display and semiconductor fields is expected.
This book explains the fundamentals of nanoimprinting in terms of materials, processes, and machines. The applications of nanoimprinting in optics, biology, energy, and electronics are also described. As many practical examples of nanoimprinting as possible are included in the book. The fundamentals will help advanced undergraduate and graduate students understand nanoimprinting. The examples will be useful for both researchers working in nanoimprinting for the first time and engineers involved in research and development of various devices using nanostructures.
- Explains the fundamentals of nanoimprinting
- Describes applications of nanoimprinting in optics, biology, energy, and electronics
- Includes practical examples of nanoimprinting
Basic Mechanisms of Nanoimprint Lithography
UV Nanoimprint Lithography Process Simulation
Demolding Process Simulation
Measurement and Analysis Methods in Nanoimprinting
Makoto Okada and Yoshihiko Hirai
Akihiro Miyauchi and Hiroshi Sato