Micro- and nanofabrication technologies have got into gear in the current information-intensive society. The industry is giant and attractive, and a lot of scientists and engineers from different fields such as physics, electronics, chemistry, and materials sciences are involved. Although a number of books have been published on micro- and nanofabrication, most of them are specialized and complicated and are meant for readers with a good background of microelectronics or semiconductor physics. This makes it difficult to start learning about this attractive, new field.
This book describes the basics of micro- and nanofabrication based on the concept of “using gases as a fabrication tool.” It can be easily understood by undergraduate, or even high-school, students in science and engineering courses versed with entry-level mathematics, physics, and chemistry. It also explains the necessary theories in a simple manner to encourage them to read specialized books. It is an attractive guide for students, young engineers, and anyone interested in micro- and nanofabrication.
