Nanofabrication by Ion-Beam Sputtering View Front MatterView Back Matter

Nanofabrication by Ion-Beam Sputtering

Fundamentals and Applications

by Tapobrata Som and Dinakar Kanjilal

"This volume provides a remarkable overview of the status of the evolving field of ion-beam sputtering and its promising applications as a process tool for tailoring self-organized patterned properties and periodic nanoscale topographic features of surfaces. The topical scope includes the fundamental physics of sputtering, advanced simulations of pattern formation, and selected experimental applications.   The list of authors includes distinguished authorities in this field, and the book will surely become a highly cited reference source, as future manufacturing technologies develop."

Dr. J. E. E. Baglin, IBM Almaden Research Center, USA
  • Format: Hardcover
  • ISBN: 9789814303750
  • Subject: Optics and Laser Physics
  • Published: November 2012
  • Pages: 372